diff --git a/runners/core-construction-java/src/main/java/org/apache/beam/runners/core/construction/External.java b/runners/core-construction-java/src/main/java/org/apache/beam/runners/core/construction/External.java
index 534a2b5fe0e6..93a1ade474a5 100644
--- a/runners/core-construction-java/src/main/java/org/apache/beam/runners/core/construction/External.java
+++ b/runners/core-construction-java/src/main/java/org/apache/beam/runners/core/construction/External.java
@@ -19,6 +19,7 @@
 
 import static org.apache.beam.vendor.guava.v32_1_2_jre.com.google.common.base.Preconditions.checkArgument;
 
+import java.io.File;
 import java.io.FileOutputStream;
 import java.io.IOException;
 import java.nio.file.Files;
@@ -391,7 +392,8 @@ private static List<RunnerApi.ArtifactInformation> resolveArtifacts(
                       .build())
               .getReplacementsList()) {
         Path path = Files.createTempFile("beam-artifact", "");
-        try (FileOutputStream fout = new FileOutputStream(path.toFile())) {
+        File artifactFile = path.toFile();
+        try (FileOutputStream fout = new FileOutputStream(artifactFile)) {
           for (Iterator<ArtifactApi.GetArtifactResponse> it =
                   retrievalStub.getArtifact(
                       ArtifactApi.GetArtifactRequest.newBuilder().setArtifact(artifact).build());
@@ -409,6 +411,8 @@ private static List<RunnerApi.ArtifactInformation> resolveArtifacts(
                         .build()
                         .toByteString())
                 .build());
+        // Delete beam-artifact temp File on program exit
+        artifactFile.deleteOnExit();
       }
       return resolved;
     }